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73 Assignee: Advanced Technology Materials, Inc., 57 Danbury, Conn. Electron field emission devices (cold cathodes), Vacuum microelectronic devices and field emission displayS which 21 Appl. No.: 575,485 incorporate cold cathodes and methods of making and using 22 Filed: Dec. 20, 1995 Same. More Specifically, cold cathode devices comprising (51) Int. Cl................................................... H01J 1/30 electron emitting structures grown directly onto a Substrate 52 US Cl................... 313/311; 313/346 R; 313/495 material. The invention also relates to patterned precursor 58 Field of Search................... 437/31, 186; 313/495, Substrates for use in fabricating field emission devices and 313/306, 346 R methods of making Same and also to catalytically growing 56) References Cited other electronic Structures, Such as films, cones, cylinders, pyramids or the like, directly onto Substrates.