Inventors
Jeffrey S Flynn, George R Brandes, Robert P Vaudo, David M Keogh, Xueping Xu, Barbara E Landini
Publication date
2002/9/10
Patent office
US
Patent number
6447604
Application number
09605195
Description
(54) METHOD FOR ACHIEVING IMPROVED 5,536,323 A 7/1996 Kirlin et al. EPITAXY QUALITY (SURFACE TEXTURE 5,679,152. A 10/1997 Tischler et al. AND DEFECT DENSITY) ON FREE- 5, 770887 A: 6/1998 Tadatomo
Total citations
Scholar articles
JS Flynn, GR Brandes, RP Vaudo, DM Keogh, X Xu… - US Patent 6,447,604, 2002