Authors
Julien Carlier, Steve Arscott, Vincent Thomy, JC Fourrier, F Caron, Jean-Christophe Camart, C Druon, P Tabourier
Publication date
2004/2/6
Journal
Journal of micromechanics and Microengineering
Volume
14
Issue
4
Pages
619
Publisher
IOP Publishing
Description
We present a design for integrated lab-on-chip microsystems dedicated to mass spectrometry analysis based on the fabrication of watertight microchannels for the circulation of liquids. In this paper, we demonstrate how to fabricate complete polymer microchannels using the negative photoresist SU-8 which has the advantage of being compatible with protein analysis by mass spectrometry. Our method of fabrication requires novel technological steps involving SU-8 multi-layer processing, improved SU-8 adhesion and the use of SU-8 wafer bonding for the watertight closing of the microchannels with a Pyrex wafer. This technique also encompasses the design of various microfluidic elements such as tapered recesses for the housing of capillary tubes allowing the connection of the channels to external systems. Following this, the capillary tubes were used to test the hydrodynamic behaviour of the channels and …
Total citations
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Scholar articles
J Carlier, S Arscott, V Thomy, JC Fourrier, F Caron… - Journal of micromechanics and Microengineering, 2004