Authors
SY ZHU, XP QU, GP RU, BZ LI, Christophe Detavernier, Roland Vanmeirhaeghe, Felix Cardon
Publication date
2002
Journal
CHINESE JOURNAL OF SEMICONDUCTORS
Volume
23
Pages
6-9
Description
A BEEM study on the effects of the annealing temperature on barrier height inhomogeneity
of CoSi2/Si contact formed in Co-Ti-Si systems. Universiteit Gent Add publications and
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results 2.A BEEM study on the effects of the an... A BEEM study on the effects of the
annealing temperature on barrier height inhomogeneity of CoSi2/Si contact formed in Co-Ti-Si
systems. SY ZHU, XP QU, GP RU, BZ LI, Christophe Detavernier (UGent) , Roland
Vanmeirhaeghe (UGent) and Felix Cardon (2002) CHINESE JOURNAL OF
SEMICONDUCTORS. 23. p.6-9 Author SY ZHU, XP QU, GP RU, BZ LI, Christophe
Detavernier (UGent) , Roland Vanmeirhaeghe (UGent) and Felix Cardon Organization
Department of Solid state sciences Citation Cite this …
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SY ZHU, XP QU, GP RU, BZ LI, C Detavernier… - CHINESE JOURNAL OF SEMICONDUCTORS, 2002