Authors
Yu-Long Jiang, Xin-Ping Qu, Guo-Ping Ru, Bing-Zong Li
Description
The following topics are dealt with: doping technology; annealing technology; shallow junction compound semiconductors; junction technology; modeling and simulation; silicide technology; contact technology; and CMOS device structures junction technology.
Scholar articles
YL Jiang, XP Qu, GP Ru, BZ Li