Loading...
The system can't perform the operation now. Try again later.
Articles
Case law
Profiles
My profile
My library
Metrics
Alerts
Settings
Get journal articles
Get journal articles
Profiles
My profile
My library
Oliver D Patterson
Intel
Verified email at intel.com
Cited by 3619
e-beam inspection
voltage contrast test structures
semiconductor process characterization
Shahnewaz M Emtiaz
ASML-HMI
Verified email at syr.edu
Cited by 140
Semiconductor
E-beam Inspection
High Vacuum
Laboratory Astrophysics
Qing Tian
Hermes-Microvision Inc
Cited by 11
Semiconductor
SEM
e-beam inspection
Jay Shah
Cited by 7
semiconductor industry
e-beam inspection
advanced technology nodes
metrology
yield improvement
Privacy
Terms
Help
About Scholar
Search help