Jang-hwan Kim

Jang-hwan Kim

Samsung Electronics
Verified email at samsung.com
Cited by 35929
Power Electronics Mechatronics EUV Lithography
Hyeongkeun Kim

Hyeongkeun Kim

Principal Researcher, Electronic Convergence Material and Device ResearchCenter, Korea …
Verified email at keti.re.kr
Cited by 13937
Graphene ALD EUV Pellicle
vadim banine

vadim banine

ASML
Verified email at asml.com
Cited by 6105
EUV
Curtis Rettig

Curtis Rettig

Principal Scientist, Spectra-Physics
Verified email at spectra-physics.com
Cited by 6027
plasma physics lasers plasma diagnostics EUV
Francis Eparvier

Francis Eparvier

University of Colorado, LASP
Verified email at colorado.edu
Cited by 5928
Sun EUV Irradiance Space Weather Mars
Yong Wang

Yong Wang

Research Scientist, Colorado State University
Verified email at engr.colostate.edu
Cited by 3558
Optics Laser soft x-ray EUV
Peter Baumgart

Peter Baumgart

Diamond Foundry, Mirraviz Inc., Cymer/ASML, Hitachi GST (HGST), IBM
Verified email at baumgart.us
Cited by 3350
Laser/Optics EUV Magnetic Recording Hard Disk Drives (HDDs) Thin Films/Vacuum Deposition
David Allred

David Allred

Brigham Young University
Verified email at byu.edu
Cited by 3350
thin film EUV ellipsometry space mirror actinide
Akira Sasaki

Akira Sasaki

Kansai Photon Science Institute (KPSI), QST
Verified email at qst.go.jp
Cited by 3100
plasmas quantum electronics EUV modeling and simulation percolation
Viktor Chikan

Viktor Chikan

ASML
Verified email at asml.com
Cited by 2933
physical chemistry nanotechnology laser spectroscopy cancer research and drug delivery EUV
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