Seung-Woo Kim

Seung-Woo Kim

Korea Advanced Institute of Science and Technology (KAIST)
Verified email at kaist.ac.kr
Cited by 10289
Metrology Optical communication Laser development EUV generation Terahertz generation
Oscar O. Versolato

Oscar O. Versolato

Group leader and Head of Department, Advanced Research Center for Nanolithography …
Verified email at arcnl.nl
Cited by 2451
atomic plasma processes spectroscopy EUV generation highly charged ions ion traps
Joohwan Kim

Joohwan Kim

UC San Diego
Verified email at ucsd.edu
Cited by 567
plasma ion acceleration euv generation computational physics
Dmitry Kurilovich

Dmitry Kurilovich

ASML
Verified email at asml.com
Cited by 565
Plasma physics Laser physics Fluid dynamics EUV generation
Marien Simeni Simeni

Marien Simeni Simeni

Assistant Professor of Mechanical Engineering, University of Minnesota
Verified email at umn.edu
Cited by 535
laser spectroscopy plasma physics EUV generation reactive flows laser-produced plasmas
Ragava Lokasani

Ragava Lokasani

Czech technical University
Verified email at dhl.com
Cited by 132
Laser and Plasma spectroscopy plasma diagnostics Highly charged ions EUV generation