Dr. Farrokh Ayazi
Director, Center for MEMS and Microsystems Technologies, Georgia Institute of Technology
Verified email at gatech.edu
Cited by 17485
Huikai Xie
Professor of Microelectronics and MEMS, Beijing Institute of Technology
Verified email at bit.edu.cn
Cited by 11322
Andrei M. Shkel
Professor of Mechanical and Aerospace Engineering, University of California, Irvine
Verified email at uci.edu
Cited by 10734