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Ren-Guan Duan
Director, Distinguished Member Technical Staff
Verified email at amat.com
Cited by 7180
Nano Materials
Semiconductor Equipment
New Energy
Mark Davidson
Spectel Research Corp.
Verified email at spectelresearch.com
Cited by 2468
Physics
quantum theory
electromagnetic theory
semiconductor equipment
energy
Chunlei Zhang
Tesla
Verified email at amat.com
Cited by 1873
System Control and Optimization
Semiconductor Equipment
Autonmous System
전성훈
Kongju University
Cited by 814
ALD
semiconductor equipment
deposition equipment
PEALD
Sreeram Sonti
ASML
Verified email at asml.com
Cited by 788
Semiconductor Equipment
Technologies & processes
Mechanical Engineering
Design and manufacturing
Amir Wachs
Business Development
Verified email at amat.com
Cited by 591
Semiconductor Equipment
Process Control
Eun-Soo Hwang
Semiconductor Research & Development, Samsung Electronics
Verified email at samsung.com
Cited by 476
Memory Measurement & Inspection
Semiconductor Equipment
Imaging Ellipsometry
Nano-print
MEMS
Shuhao Liu
Thermo Fisher Scientific
Verified email at case.edu
Cited by 172
condensed matter physics
charged particle optics
semiconductor equipment
J. Xue
Applied Materials Inc.
Verified email at amat.com
Cited by 152
low temperature plasma science and …
semiconductor equipment
Brian Cha
Samsung Electronic
Verified email at samsung.com
Cited by 148
EUV Lithography
Semiconductor Equipment
Lithography
Photomask
Global Supplier Management
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