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Holistic feedforward control for the 5 nm logic node and beyond H Megens, R Brinkhof, I Aarts, H Kok, L Karssemeijer, G ten Haaf, S Lee, ... Optical Microlithography XXXII 10961, 119-131, 2019 | 14 | 2019 |
Reduction in overlay error from mark asymmetry using simulation, ORION, and alignment models B Menchtchikov, R Socha, C Zheng, S Raghunathan, I Aarts, K Shome, ... Optical Microlithography XXXI 10587, 81-90, 2018 | 22 | 2018 |
Search for flavour-changing neutral current top-quark decays to qZ q Z in pp pp collision data collected with the ATLAS detector at s= 8 s= 8 TeV G Aad, B Abbott, J Abdallah, O Abdinov, R Aben, M Abolins, OS AbouZeid, ... The European Physical Journal C 76, 1-24, 2016 | 193 | 2016 |
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