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Marc Sansa
Marc Sansa
CEA - LETI
Verified email at msansa.com
Title
Cited by
Year
0.018°/√ hr, SUB-0.2°/hr MEMS Pitch/Roll Piezoresistive Gyroscope with Decoupled Tilt of the Mass and of the Gauges Lever
M Gadola, A Buffoli, T Verdot, P Robert, M Sansa, G Langfelder
Proceeding of IEEE MEMS 2024, 11-14, 2024
2024
0.02°/h, 0.004°/√ h, 6.3-mA NEMS Gyroscope With Integrated Circuit
A Buffoli, M Gadola, M Sansa, G Langfelder
IEEE Transactions on Instrumentation and Measurement 72, 1-8, 2023
82023
1 million-Q optomechanical microdisk resonators for sensing with very large scale integration
M Hermouet, M Sansa, L Banniard, A Fafin, M Gely, PE Allain, EG Santos, ...
Microfluidics, BioMEMS, and Medical Microsystems XVI 10491, 48-51, 2018
32018
1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration
M Hermouet, L Banniard, M Sansa, A Fafin, M Gely, S Pauliac, ...
Multidisciplinary Digital Publishing Institute Proceedings 1 (4), 347, 2017
52017
1.3 mm2 Nav-Grade NEMS-Based Gyroscope
M Gadola, A Buffoli, M Sansa, A Berthelot, P Robert, G Langfelder
Journal of Microelectromechanical Systems 30 (4), 513-520, 2021
442021
15.6 A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution
G Gourlat, M Sansa, P Villard, G Sicard, G Jourdan, I Ouerghi, G Billiot, ...
Solid-State Circuits Conference (ISSCC), 2017 IEEE International, 266-267, 2017
32017
200 mm Surface and Bulk Acoustic Wave devices based on Piezoelectric-On-Insulator substrate
M Bousquet, A Joulie, C Hellion, M Sansa, J Delprato, P Perreau, ...
2023 Joint Conference of the European Frequency and Time Forum and IEEE …, 2023
12023
50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√ Hz ARW and 0.5°/h stability
M Gadola, F Maspero, G Langfelder, M Sansa, T Verdot, A Berthelot, ...
2020 IEEE Sensors, 1-4, 2020
32020
A 20 ppb Resolution Readout Circuit Dedicated to Optomechanical Mass Sensors
HE Dawale, S Regord, T Furcatte, M Sansa, P Villard, G Jourdan, ...
2022 IEEE Sensors, 1-4, 2022
2022
A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution
G Gourlat, M Sansa, P Villard, G Sicard, G Jourdan, I Ouerghi, G Billiot, ...
3*2017
A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors
I Martin-Fernandez, M Sansa, F Perez-Murano, P Godignon, ...
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference …, 2010
22010
Ampacity and electrical properties of thermally treated ultrathin carbon membranes grown by focused ion beam induced deposition of phenanthrane
G Rius, M Sansa, X Borrise, F Perez-Murano, M Yoshimura, N Mestres
2014 IEEE International Nanoelectronics Conference (INEC), 1-4, 2014
2014
BAW Filter for space applications at 4.2 GHz
D Mercier, T Claret, M Sansa, C Hellion, J Delprato, Y Lamy, S Ballandras, ...
2022 52nd European Microwave Conference (EuMC), 416-419, 2022
32022
Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction
M Sansa, M Fernandez-Regulez, M Serra-Garcia, AS Paulo, ...
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS …, 2013
2013
Charge-independent mass spectrometry of single virus capsids above 100MDa with nanomechanical resonators
S Dominguez-Medina, S Fostner, M Defoort, M Sansa, AK Stark, ...
arXiv preprint arXiv:1804.02340, 2018
12018
Co-Design and Characterization of a Differential Wireless Passive Micro-Electromechanical System Pressure Sensor
R Alcesilas, JC Bastien, M Sansa, C Jouvaud, P Rey, C Delaveaud
Proceedings 97 (1), 24, 2024
2024
Compact and modular system architecture for a nano-resonator-mass spectrometer
A Reynaud, W Trzpil, L Dartiguelongue, V Çumaku, T Fortin, M Sansa, ...
Frontiers in Chemistry 11, 1238674, 2023
12023
Compact heterodyne NEMS oscillator for sensing applications
M Sansa, G Gourlat, G Jourdan, P Villard, G Sicard, S Hentz
2015 45th European Solid State Device Research Conference (ESSDERC), 146-148, 2015
62015
Correlation between electronic properties and structural characteristics of patterned nanographene
G Rius, M Sansa, X Borrise, F Perez-Murano, M Yoshimura, O Eryu, ...
Design of a MEMS-Based Fully Passive Wireless Pressure Sensor for Harsh Environments
R Alcesilas, P Rey, C Jouvaud, M Sansa, JC Bastien, C Delaveaud
2022 Smart Systems Integration (SSI), 1-4, 2022
12022
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