| 100 mm dynamic stencils pattern sub-micrometre structures V Savu, S Xie, J Brugger Nanoscale 3 (7), 2739-2742, 2011 | 12 | 2011 |
| A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application SQ Xie, J Wan, BR Lu, Y Sun, Y Chen, XP Qu, R Liu Microelectronic Engineering 85 (5-6), 914-917, 2008 | 35 | 2008 |
| Abstract No. 1O-068 SQ Xie, BR Lu, Y Sun, Y Chen, XP Qu, R Liu International Conference on Nanoscience and Technology, Beijing, China, 2007 | 3 | 2007 |
| Applications of nanoimprint lithography for biochemical and nanophotonic structures using SU-8 B Lu, SQ Xie, J Wan, R Yang, Z Shu, XP Qu, R Liu, Y Chen, E Huq International Journal of Nanoscience 8 (01n02), 151-155, 2009 | 6 | 2009 |
| Arrays of pentacene single crystals by stencil evaporation P Fesenko, V Flauraud, S Xie, J Brugger, J Genoe, P Heremans, C Rolin Crystal Growth & Design 16 (8), 4694-4700, 2016 | 8 | 2016 |
| Design and fabrication of Bragg reflectors based on SU-8 Z Shu, J Wan, SQ Xie, BR Lu, Y Chen, XP Qu, R Liu 2008 9th International Conference on Solid-State and Integrated-Circuit …, 2008 | 1 | 2008 |
| Development of novel su-8 based nanoimprint lithography SQ Xie, BR Lu, J Wan, R Yang, Y Chen, XP Qu, R Liu 2008 9th International Conference on Solid-State and Integrated-Circuit …, 2008 | 1 | 2008 |
| Duplication of nanoimprint templates by a novel SU-8/SiO2/PMMA trilayer technique J Wan, Z Shu, SR Deng, SQ Xie, BR Lu, R Liu, Y Chen, XP Qu Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 8 | 2009 |
| Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography M Frantlović, I Jokić, V Savu, S Xie, J Brugger Microelectronic engineering 98, 230-233, 2012 | 7 | 2012 |
| Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes M Gauvin, J Grisolia, T Alnasser, B Viallet, S Xie, J Brugger, L Ressier Nanoscale 8 (22), 11363-11370, 2016 | 22 | 2016 |
| Fabrication and characterization of high extinction ratio transmission polarizers ZC Xu, SQ Xie, Z Shu, BR Lu, J Wan, Y Chen, E Huq, XP Qu, R Liu Microelectronic engineering 87 (5-8), 1005-1007, 2010 | 3 | 2010 |
| Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography SQ Xie, BR Lu, Y Sun, Y Chen, XP Qu, R Liu Journal of Nanoscience and Nanotechnology 9 (2), 1437-1440, 2009 | 4 | 2009 |
| Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8 R Yang, BR Lu, J Wan, SQ Xie, Y Chen, E Huq, XP Qu, R Liu Microelectronic Engineering 86 (4-6), 1379-1381, 2009 | 27 | 2009 |
| Fabrication of planar chiral photonic meta-materials on SU-8 using nanoimprint lithography technique BR Lu, SQ Xie, Y Sun, Y Chen, XP Qu, R Liu Proceedings of the International Conference on Nanoscience & Technology …, 2007 | | 2007 |
| Fast patterning and dry-etch of SiN_x for high resolution nanoimprint templates 疏珍， 万景， 陆冰睿， 谢申奇， 陈宜方， 屈新萍， 刘冉 半导体学报: 英文版, 138-141, 2009 | | 2009 |
| Fast patterning and dry-etch of SiNx for high resolution nanoimprint templates S Zhen, W Jing, L Bingrui, X Shenqi, C Yifang, Q Xinping, L Ran Journal of Semiconductors 30, 066001, 2009 | | 2009 |
| Fibered reflective micro objectives for miniaturized scanning confocal fluorescence microscopy S Xie, E Shaffer, L Jacot-Descombes, D Joss, B Rachet, D Kosanic, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | | 2015 |
| Group ID U10321 Affiliated authors Auzelyte, Vaida W Bashir, W Benoit, A Bertsch, PA Besse, T Besson, G Boero, N Bouendin, ... | | |
| Growth of organic semiconductor thin films with multi-micron domain size and fabrication of organic transistors using a stencil nanosieve P Fesenko, V Flauraud, S Xie, E Kang, T Uemura, J Brugger, J Genoe, ... ACS applied materials & interfaces 9 (28), 23314-23318, 2017 | 4 | 2017 |
| Heated mask S Xie, A Savu, J Brugger | | 2013 |
Juergen BruggerProfessor of Microengineering (EPFL)Verified email at epfl.ch