| 1. Supporting Figures DZ Chen, D Jang, KM Guan, Q An, WA Goddard III, JR Greer | | |
| 2012 12th International Workshop on Junction Technology Extended Abstracts YL Jiang, XP Qu, GP Ru, BZ Li | | |
| 2014 International Workshop on Junction Technology (IWJT) Extended Abstracts YL Jiang, XP Qu, GP Ru, BZ Li | | |
| 2016 16th International Workshop on Junction Technology (IWJT) Extended Abstracts YL Jiang, XP Qu, GP Ru, BZ Li | | |
| 22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching C Gao, SR Deng, J Wan, BR Lu, R Liu, E Huq, XP Qu, Y Chen Microelectronic engineering 87 (5-8), 927-930, 2010 | 27 | 2010 |
| A BEEM study of PtSi Schottky contacts on ion-milled Si GP Ru, C Detavernier, RA Donaton, A Blondeel, P Clauws, ... MRS Online Proceedings Library (OPL) 564, 201, 1999 | | 1999 |
| A BEEM study of Schottky barrier height distributions of ultrathin CoSi2/n-Si (100) formed by solid phase epitaxy S Zhu, C Detavernier, RL Van Meirhaeghe, XP Qu, GP Ru, F Cardon, ... Semiconductor science and technology 15 (4), 349, 2000 | 20 | 2000 |
| A BEEM study on the effects of the annealing temperature on barrier height inhomogeneity of CoSi2/Si contact formed in Co-Ti-Si systems. SY ZHU, XP QU, GP RU, BZ LI, C Detavernier, R Vanmeirhaeghe, ... CHINESE JOURNAL OF SEMICONDUCTORS 23, 6-9, 2002 | | 2002 |
| A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application SQ Xie, J Wan, BR Lu, Y Sun, Y Chen, XP Qu, R Liu Microelectronic Engineering 85 (5-6), 914-917, 2008 | 34 | 2008 |
| A new chemically amplified resist for high resolution patterning by E-beam lithography BR Lu, Y Chen, E Huq, XP Qu, R Liu Journal of nanoscience and nanotechnology 10 (11), 7130-7133, 2010 | 6 | 2010 |
| A non-destructive, fast evaluation of PVD diffusion barriers deposited on porous low-k dielectrics Y Wang, P He, J Zhang, J Yan, DV Lopaev, XP Qu, MR Baklanov Microelectronic Engineering 198, 22-28, 2018 | 9 | 2018 |
| A novel 3D nanolens for sub-wavelength focusing by self-aligned nanolithography BR Lu, Y Chen, SW Wang, E Huq, E Rogers, TS Kao, XP Qu, R Liu, ... Microelectronic engineering 87 (5-8), 1506-1508, 2010 | 7 | 2010 |
| A novel surface plasmon biosensor with imprinted waveguide metal gratings for protein detection ZC Xu, B Dong, BR Lu, Y Chen, E Huq, XP Qu, R Liu Microelectronic engineering 88 (8), 2647-2649, 2011 | 5 | 2011 |
| A study on (Co1-xNixSi2) Schottky contacts on N-Si (100) substrates XP Qu, C Detavernier, RL Van Meirhaeghe, F Cardon, A Lauwers, ... | | 2001 |
| Advanced metallization for ULSI applications FOREWORD O Nakatsuka, MR Baklanov, C Zhao, M Chan, J Leu, J Luo, XP Qu, ... JAPANESE JOURNAL OF APPLIED PHYSICS 58, 0-0, 2019 | | 2019 |
| Ag dendrite formed on the Cu pyramids as SERS substrate PF Nan, X Wang, XP Qu 2013 IEEE 10th International Conference on ASIC, 1-3, 2013 | | 2013 |
| ALD growth of Ru on RIE-pretreated TaN substrate M Zhou, T Chen, J Tan, F Zhao, G Ru, B Li, X Qu 2006 8th International Conference on Solid-State and Integrated Circuit …, 2006 | 2 | 2006 |
| ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems T Waechtler, SF Ding, L Hofmann, R Mothes, Q Xie, S Oswald, ... Microelectronic Engineering 88 (5), 684-689, 2011 | 67 | 2011 |
| Aminosilanization nanoadhesive layer for nanoelectric circuits with porous ultralow dielectric film Z Zhao, Y He, H Yang, X Qu, X Lu, J Luo ACS Applied Materials & Interfaces 5 (13), 6097-6107, 2013 | 21 | 2013 |
| An atomic force microscopy study of thin CoSi/sub 2/films formed by solid state reaction GP Ru, J Liu, XP Qu, BZ Li, C Detavernier, RL Van Meirhaeghe, F Cardon 1998 5th International Conference on Solid-State and Integrated Circuit …, 1998 | 3 | 1998 |
Shenqi XieEPFLVerified email at epfl.ch