Articles with public access mandates - Hiroyuki MiyazoeLearn more
Not available anywhere: 2
Electron beam generated plasmas: Characteristics and etching of silicon nitride
SG Walton, DR Boris, SC Hernández, EH Lock, TB Petrova, GM Petrov, ...
Microelectronic Engineering 168, 89-96, 2017
Mandates: US Department of Defense
Applications for Surface Engineering Using Atomic Layer Etching-Invited Paper
J Papalia, N Marchack, R Bruce, H Miyazoe, S Engelmann, EA Joseph
Solid State Phenomena 255, 41-48, 2016
Mandates: US National Science Foundation, US Department of Energy
Available somewhere: 4
Etching with electron beam-generated plasmas: Selectivity versus ion energy in silicon-based films
SG Walton, DR Boris, SG Rosenberg, H Miyazoe, EA Joseph, ...
Journal of Vacuum Science & Technology A 39 (3), 2021
Mandates: US Department of Energy
Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
H Miyazoe, SU Engelmann, MA Guillorn, D Pei, W Li, JL Lauer, ...
Journal of Vacuum Science & Technology A 35 (5), 2017
Mandates: US National Science Foundation
Application of cyclic fluorocarbon/argon discharges to device patterning
D Metzler, K Uppireddi, RL Bruce, H Miyazoe, Y Zhu, W Price, ES Sikorski, ...
Journal of Vacuum Science & Technology A 34 (1), 2016
Mandates: US National Science Foundation, US Department of Energy
Evaluation of ALE processes for patterning
JM Papalia, N Marchack, RL Bruce, H Miyazoe, SU Engelmann, ...
Advanced Etch Technology for Nanopatterning V 9782, 20-29, 2016
Mandates: US National Science Foundation, US Department of Energy
Publication and funding information is determined automatically by a computer program