| MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer A Dehe, G Ruhl US Patent 9,516,428, 2016 | 215 | 2016 |
| Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point R Nadal-Guardia, A Dehe, R Aigner, LM Castaner Journal of microelectromechanical systems 11 (3), 255-263, 2002 | 197 | 2002 |
| Microphone and method of producing a microphone A Dehe, M Fueldner US Patent App. 11/075,039, 2005 | 162 | 2005 |
| Micromechanical sensors and methods of manufacturing same A Dehe, M Fueldner US Patent 7,190,038, 2007 | 155 | 2007 |
| High-sensitivity microwave power sensor for GaAs-MMIC implementation A Dehe, V Krozer, B Chen, HL Hartnagel Electronics Letters 32 (23), 2149-2150, 1996 | 99 | 1996 |
| Analytical analysis and finite element simulation of advanced membranes for silicon microphones M Fuldner, A Dehé, R Lerch IEEE Sensors Journal 5 (5), 857-863, 2005 | 93 | 2005 |
| Long resonator micromachined tunable GaAs-AlAs Fabry-Perot filter J Peerlings, A Dehe, A Vogt, M Tilsch, C Hebeler, F Langenhan, ... IEEE Photonics Technology Letters 9 (9), 1235-1237, 1997 | 93 | 1997 |
| Integrated microwave power sensor A Dehe, V Krozer, K Fricke, H Klingbeil, K Beilenhoff, HL Hartnagel Electronics Letters 31 (25), 2187-2188, 1995 | 80 | 1995 |
| A4. 3-The infineon silicon MEMS microphone A Dehé, M Wurzer, M Füldner, U Krumbein Proceedings Sensor 2013, 95-99, 2013 | 76 | 2013 |
| A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology A Dehe, K Fricke, K Mutamba, HL Hartnagel Journal of Micromechanics and Microengineering 5 (2), 139, 1995 | 73 | 1995 |
| Silicon microphone development and application A Dehe Sensors and Actuators A: Physical 133 (2), 283-287, 2007 | 71 | 2007 |
| Micromechanical sound transducer having a membrane support with tapered surface W Klein, U Seidel, S Barzen, M Nawaz, W Friza, X Cheng, A Dehe US Patent 8,461,655, 2013 | 69 | 2013 |
| GaAs monolithic integrated microwave power sensor in coplanar waveguide technology A Dehe, H Klingbeil, V Krozer, K Fricke, K Beilenhoff, HL Hartnagel IEEE 1996 Microwave and Millimeter-Wave Monolithic Circuits Symposium …, 1996 | 64 | 1996 |
| MEMS microphone with low pressure region between diaphragm and counter electrode A Dehe, A Froemel US Patent 9,181,080, 2015 | 61 | 2015 |
| MEMS structure with adjustable ventilation openings A Dehe, M Herrmann, U Krumbein, S Barzen, W Klein, W Friza, M Wurzer US Patent 9,002,037, 2015 | 58 | 2015 |
| Infrared thermopile sensor based on AlGaAs—GasAs micromachining A Dehe, K Fricke, HL Hartnagel Sensors and Actuators A: Physical 47 (1-3), 432-436, 1995 | 57 | 1995 |
| MEMS device and method of making a MEMS device A Dehe, M Wurzer, C Herzum US Patent 9,409,763, 2016 | 56 | 2016 |
| Photoacoustic gas sensor device and a method for analyzing gas A Dehe, S Kolb, H Theuss US Patent 9,513,261, 2016 | 55 | 2016 |
| Sound transducer structure and method for manufacturing a sound transducer structure A Dehe, S Barzen, M Fueldner US Patent 7,912,236, 2011 | 54* | 2011 |
| Broadband thermoelectric microwave power sensors using GaAs foundry process A Dehe, K Fricke-Neuderth, V Krozer 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No. 02CH37278 …, 2002 | 53 | 2002 |