Surface-anchored metal–organic frameworks as versatile resists for gas-assisted e-beam lithography: Fabrication of sub-10 nanometer structures M Drost, F Tu, L Berger, C Preischl, W Zhou, H Gliemann, C Wöll, ... ACS nano 12 (4), 3825-3835, 2018 | 50 | 2018 |
Electron-beam induced deposition and autocatalytic decomposition of Co (CO) 3NO F Vollnhals, M Drost, F Tu, E Carrasco, A Späth, RH Fink, HP Steinrück, ... Beilstein journal of nanotechnology 5 (1), 1175-1185, 2014 | 38 | 2014 |
Hungry Porphyrins: Protonation and Self‐Metalation of Tetraphenylporphyrin on TiO2 (110)‐1× 1 J Köbl, T Wang, C Wang, M Drost, F Tu, Q Xu, H Ju, D Wechsler, M Franke, ... ChemistrySelect 1 (19), 6103-6105, 2016 | 32 | 2016 |
Region‐Selective Deposition of Core–Shell Nanoparticles for 3 D Hierarchical Assemblies by the Huisgen 1, 3‐Dipolar Cycloaddition SH Etschel, L Portilla, J Kirschner, M Drost, F Tu, H Marbach, ... Angewandte Chemie International Edition 54 (32), 9235-9238, 2015 | 26 | 2015 |
Pushing the limits of EUV mask repair: addressing sub-10 nm defects with the next generation e-beam-based mask repair tool T Heil, M Waldow, R Capelli, H Schneider, L Ahmels, F Tu, J Schöneberg, ... Journal of Micro/Nanopatterning, Materials, and Metrology 20 (3), 031013-031013, 2021 | 14 | 2021 |
On the magnetic properties of iron nanostructures fabricated via focused electron beam induced deposition and autocatalytic growth processes F Tu, M Drost, F Vollnhals, A Späth, E Carrasco, RH Fink, H Marbach Nanotechnology 27 (35), 355302, 2016 | 14 | 2016 |
On the Principles of Tweaking nanostructure fabrication via focused electron beam induced processing combined with catalytic growth processes M Drost, F Tu, F Vollnhals, I Szenti, J Kiss, H Marbach Small Methods 1 (6), 1700095, 2017 | 12 | 2017 |
Exploring the fabrication of Co and Mn nanostructures with focused soft X-ray beam induced deposition F Tu, A Späth, M Drost, F Vollnhals, S Krick Calderon, RH Fink, ... Journal of Vacuum Science & Technology B 35 (3), 2017 | 10 | 2017 |
4 英寸 VGFGaAs 单晶生长的数值模拟与实验研究 丁国强, 苏小平, 屠海令, 张峰燚, 涂凡 稀有金属 33 (2), 211, 2009 | 9 | 2009 |
Additive fabrication of nanostructures with focused soft X-rays A Späth, F Tu, F Vollnhals, M Drost, SK Calderón, B Watts, RH Fink, ... RSC advances 6 (100), 98344-98349, 2016 | 8 | 2016 |
High-end EUV photomask repairs for 5nm technology and beyond H Schneider, F Tu, L Ahmels, B Szafranek, K Gries, D Rhinow, S Vollmar, ... Photomask Technology 2020 11518, 1151808, 2020 | 5 | 2020 |
VGF 法 GaAs 单晶位错分布的数值模拟和 Raman 光谱研究 涂凡, 苏小平, 屠海令, 张峰燚, 丁国强, 王思爱 稀有金属 34 (2), 237, 2010 | 5 | 2010 |
SEM AutoAnalysis for reduced turnaround time and to ensure repair quality of EUV photomasks K Egodage, F Tu, H Schneider, CF Hermanns, G Kersteen, B Szafranek, ... International Conference on Extreme Ultraviolet Lithography 2019 11147, 156-165, 2019 | 4 | 2019 |
Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits F Tu, M Drost, I Szenti, J Kiss, Z Kónya, H Marbach Beilstein Journal of Nanotechnology 8 (1), 2592-2605, 2017 | 3 | 2017 |
数字模拟法研究坩埚锥角对 VGF 法 GaAs 单晶生长的影响 王思爱, 苏小平, 张峰燚, 丁国强, 涂凡 稀有金属 35 (004), 525-530, 2011 | 3 | 2011 |
Focused soft X-ray beam induced deposition: Recent advances to a novel approach for fabrication of metallic nanostructures A Spath, F Vollnhals, F Tu, KC Prince, R Richter, J Raabe, H Marbach, ... Microscopy and Microanalysis 24 (S2), 114-115, 2018 | 2 | 2018 |
VGF 法生长 4 英寸 GaAs 单晶固液界面形状和热应力的数值模拟研究 涂凡, 苏小平, 张峰燚, 黎建明, 丁国强, 王思爱 稀有金属 35 (3), 388-393, 2011 | 2 | 2011 |
VGF 法生长 6 英寸 GaAs 单晶生长速率的优化 丁国强, 屠海令, 苏小平, 张峰燚, 涂凡, 王思爱 稀有金属 35 (1), 42-46, 2011 | 2 | 2011 |
6 英寸砷化镓单晶 VGF 法生长中坩埚-埚托间隙对晶体生长过程影响 涂凡, 苏小平, 张峰燚, 黎建明, 丁国强 稀有金属 35 (4), 617-622, 2011 | 1 | 2011 |
10cm VGF 法 GaAs 单晶生长过程中热应力的数值模拟 涂凡, 苏小平, 屠海令, 张峰燚, 丁国强, 王思爱 红外与激光工程 3, 2010 | 1 | 2010 |