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Cheng-Yu Chen(陳政佑)
Cheng-Yu Chen(陳政佑)
Chemical engineering, Ming Chi University of Technology(明志科技大學化學工程系)
Verified email at mail.mcut.edu.tw
Title
Cited by
Cited by
Year
Operational aspects of chemical mechanical polishing polish pad profile optimization
CY Chen, CC Yu, SH Shen, M Ho
Journal of the Electrochemical Society 147 (10), 3922, 2000
532000
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