| Quantum limit of quality factor in silicon micro and nano mechanical resonators S Ghaffari, SA Chandorkar, S Wang, EJ Ng, CH Ahn, V Hong, Y Yang, ... Scientific reports 3 (1), 3244, 2013 | 149 | 2013 |
| Temperature dependence of the elastic constants of doped silicon EJ Ng, VA Hong, Y Yang, CH Ahn, CLM Everhart, TW Kenny Journal of microelectromechanical systems 24 (3), 730-741, 2014 | 144 | 2014 |
| Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope SH Nitzan, V Zega, M Li, CH Ahn, A Corigliano, TW Kenny, DA Horsley Scientific reports 5 (1), 9036, 2015 | 132 | 2015 |
| Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon CH Ahn, EJ Ng, VA Hong, Y Yang, BJ Lee, I Flader, TW Kenny Journal of Microelectromechanical Systems 24 (2), 343-350, 2014 | 132 | 2014 |
| Epitaxially-encapsulated polysilicon disk resonator gyroscope S Nitzan, CH Ahn, TH Su, M Li, EJ Ng, S Wang, ZM Yang, G O'brien, ... 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 100 | 2013 |
| Accurate modeling of quality factor behavior of complex silicon MEMS resonators S Ghaffari, EJ Ng, CH Ahn, Y Yang, S Wang, VA Hong, TW Kenny Journal of Microelectromechanical Systems 24 (2), 276-288, 2014 | 96 | 2014 |
| Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump CH Ahn, S Nitzan, EJ Ng, VA Hong, Y Yang, T Kimbrell, DA Horsley, ... Applied Physics Letters 105 (24), 2014 | 90 | 2014 |
| Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process DD Shin, CH Ahn, Y Chen, DL Christensen, IB Flader, TW Kenny 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 86 | 2017 |
| 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process D Senkal, S Askari, MJ Ahamed, EJ Ng, V Hong, Y Yang, CH Ahn, ... 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 85 | 2014 |
| Direct detection of Akhiezer damping in a silicon MEMS resonator J Rodriguez, SA Chandorkar, CA Watson, GM Glaze, CH Ahn, EJ Ng, ... Scientific reports 9 (1), 2244, 2019 | 83 | 2019 |
| A 7ppm, 6/hr frequency-output MEMS gyroscope II Izyumin, MH Kline, YC Yeh, B Eminoglu, CH Ahn, VA Hong, Y Yang, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 71 | 2015 |
| Disk resonator gyroscope with whole-angle mode operation P Taheri-Tehrani, O Izyumin, I Izyumin, CH Ahn, EJ Ng, VA Hong, Y Yang, ... 2015 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2015 | 63 | 2015 |
| Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality? IP Prikhodko, JA Gregory, WA Clark, JA Geen, MW Judy, CH Ahn, ... 2016 IEEE/ION Position, Location and Navigation Symposium (PLANS), 1-4, 2016 | 55 | 2016 |
| Stability of silicon microelectromechanical systems resonant thermometers EJ Ng, HK Lee, CH Ahn, R Melamud, TW Kenny IEEE Sensors Journal 13 (3), 987-993, 2012 | 54 | 2012 |
| Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating< 20 PPM scale factor stability D Senkal, EJ Ng, V Hong, Y Yang, CH Ahn, TW Kenny, AM Shkel 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 47 | 2015 |
| Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators Y Chen, EJ Ng, DD Shin, CH Ahn, Y Yang, IB Flader, VA Hong, TW Kenny 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 44 | 2016 |
| Single-structure 3-axis Lorentz force magnetometer with sub-30 nT/√ HZ resolution M Li, EJ Ng, VA Hong, CH Ahn, Y Yang, TW Kenny, DA Horsley 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 40 | 2014 |
| Resonant pressure sensor with on-chip temperature and strain sensors for error correction CF Chiang, AB Graham, BJ Lee, CH Ahn, EJ Ng, GJ O'Brien, TW Kenny 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 37 | 2013 |
| The long path from MEMS resonators to timing products E Ng, Y Yang, VA Hong, CH Ahn, DB Heinz, I Flader, Y Chen, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 34 | 2015 |
| Multifunctional integrated sensors for multiparameter monitoring applications CL Roozeboom, BE Hill, VA Hong, CH Ahn, EJ Ng, Y Yang, TW Kenny, ... Journal of Microelectromechanical Systems 24 (4), 810-821, 2014 | 33 | 2014 |
Thomas KennyProfessor of Mechanical Engineering, Stanford UniversityVerified email at cdr.stanford.edu