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Sateesh Koka
Sateesh Koka
Semiconductor Memory
Verified email at fairchildsemi.com
Title
Cited by
Cited by
Year
Cobalt-containing conductive layers for control gate electrodes in a memory structure
RS Makala, R Sharangpani, K Sateesh, G Mizuno, N Takeguchi, ...
US Patent 10,128,261, 2018
1412018
Method of making a vertical NAND device using a sacrificial layer with air gap and sequential etching of multilayer stacks
Z Lu, K Sateesh, J Kai, RS Makala, YS Lee, J Pachamuthu, J Alsmeier, ...
US Patent 9,449,982, 2016
1102016
The crystalline to amorphous transition in PEO-based composite electrolytes: role of lithium salts
B Kumar, SJ Rodrigues, S Koka
Electrochimica Acta 47 (25), 4125-4131, 2002
812002
Crystalinity-dependent aluminum oxide etching for self-aligned blocking dielectric in a memory structure
R Sharangpani, K Sateesh, RS Makala, S Peri, S Kanakamedala
US Patent 9,659,955, 2017
722017
Three-dimensional memory structure with multi-component contact via structure and method of making thereof
S Peri, K Sateesh, RS Makala, R Sharangpani, M Baenninger, ...
US Patent 9,698,152, 2017
692017
Selective blocking dielectric formation in a three-dimensional memory structure
RS Makala, R Sharangpani, SK Kanakamedala, X Liang, G Matamis, ...
US Patent 9,484,357, 2016
642016
Three-dimensional memory devices containing memory block bridges
Z Lu, J Alsmeier, D Mao, W Shi, K Sateesh, RS Makala, G Matamis, ...
US Patent 9,679,906, 2017
552017
Differential etch of metal oxide blocking dielectric layer for three-dimensional memory devices
R Sharangpani, K Sateesh, RS Makala, S Ranganathan, M Juanitas, ...
US Patent 9,613,977, 2017
512017
Performance evaluation on the weathering resistance of two USAF coating systems (standard 85285 topcoat versus fluorinated APC topcoat) via electrochemical impedance spectroscopy
A Shi, S Koka, J Ullett
Progress in organic coatings 52 (3), 196-209, 2005
512005
Lateral stack of cobalt and a cobalt-semiconductor alloy for control gate electrodes in a memory structure
S Peri, K Sateesh, RS Makala
US Patent 9,646,975, 2017
402017
Ruthenium nucleation layer for control gate electrodes in a memory structure
R Sharangpani, RS Makala, K Sateesh, G Matamis
US Patent 9,496,419, 2016
382016
Molybdenum-containing conductive layers for control gate electrodes in a memory structure
S Peri, RS Makala, K Sateesh, YS Lee, J Alsmeier, G Matamis
US Patent 9,780,182, 2017
372017
Fluorine-free word lines for three-dimensional memory devices
R Sharangpani, RS Makala, K Sateesh, G Matamis
US Patent 9,397,046, 2016
372016
Memory device containing cobalt silicide control gate electrodes and method of making thereof
RS Makala, K Sateesh, Z Lu, S Peri, R Sharangpani
US Patent 9,842,907, 2017
362017
Semiconductor structure with concave blocking dielectric sidewall and method of making thereof by isotropically etching the blocking dielectric layer
K Sateesh, S Kanakamedala, RS Makala, R Sharangpani, Y Zhang, ...
US Patent 9,478,558, 2016
352016
Metal-semiconductor alloy region for enhancing on current in a three-dimensional memory structure
R Sharangpani, RS Makala, K Sateesh, T Kubo, J Ariyoshi, G Matamis
US Patent 9,524,977, 2016
342016
Three-dimensional memory devices having a shaped epitaxial channel portion and method of making thereof
J Pachamuthu, K Sateesh, RS Makala, S Peri
US Patent 9,754,958, 2017
312017
Metal word lines for three dimensional memory devices
R Sharangpani, RS Makala, SK Kanakamedala, K Sateesh, YS Lee, ...
US Patent 9,570,455, 2017
312017
Three dimensional NAND device and method of making thereof
K Sateesh, S Kanakamedala, Y Zhang, RS Makala, R Sharangpani, ...
US Patent 9,236,396, 2016
312016
Method of making a three dimensional NAND device
M Tsutsumi, S Fujino, K Sateesh, S Kanakamedala, Y Zhang, RS Makala, ...
US Patent 9,305,849, 2016
272016
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