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Geonwoo Park
Pusan National University
Verified email at pusan.ac.kr
Large area display
PIC Simulation
etching
surface reaction
MCC
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Simulation of Large Area Inductively Coupled Plasmas using CF4/O2 Gas for Dry Etching of a Flat Panel Display
G Park, MY Hur, C Choi, H Kim, MJ Kushner, HJ Lee
Bulletin of the American Physical Society 62
, 2017
2017
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