Minimizing tip-sample forces and enhancing sensitivity in atomic force microscopy with dynamically compliant cantilevers A Keyvani, H Sadeghian, MS Tamer, JFL Goosen, F van Keulen Journal of Applied Physics 121 (24), 2017 | 21 | 2017 |
Simultaneous AFM nano-patterning and imaging for photomask repair A Keyvani, MS Tamer, MH van Es, H Sadeghian Proc. of SPIE Vol 9778, 977818-1, 2016 | 11 | 2016 |
Image-based overlay measurement using subsurface ultrasonic resonance force microscopy MS Tamer, MJ van der Lans, H Sadeghian Metrology, Inspection, and Process Control for Microlithography XXXII 10585 …, 2018 | 8 | 2018 |
A comprehensive model for transient behavior of tapping mode atomic force microscope A Keyvani, MS Tamer, JW van Wingerden, JFL Goosen, F van Keulen Nonlinear Dynamics 97, 1601-1617, 2019 | 7 | 2019 |
Real-time estimation of the tip-sample interactions in tapping mode atomic force microscopy with a regularized Kalman filter A Keyvani, G van der Veen, MS Tamer, H Sadeghian, H Goosen, ... IEEE Transactions on Nanotechnology 19, 274-283, 2020 | 5 | 2020 |
Quantitative measurement of tip-sample interaction forces in tapping mode atomic force microscopy S Tamer, HS Marnani, SK Janbahan, H Goosen, F van Keulen 13th International Workshop on Nanomechanical Sensing, 2016 | 4 | 2016 |
Whispering-gallery modes observed in elastic scattering from submerged high-refractive-index silica microspheres H Yılmaz, H Yılmaz, MS Tamer, O Gürlü, MS Murib, A Serpengüzel Optical Engineering 56 (12), 126110-126110, 2017 | 2 | 2017 |
Method of modifying a surface of a sample, and a scanning probe microscopy system HS Marnani, AK Janbahan, MS Tamer, K Maturova US Patent App. 16/347,922, 2019 | 1 | 2019 |
Improved sub-surface AFM using photothermal actuation ME Reijzen, MS Tamer, MH Es, M Riel, A Keyvani, H Sadeghian, ... Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019 | 1 | 2019 |
Tuning of optical resonances of a microsphere with liquid crystal H Yilmaz, MS Tamer, O Gürlü, A Serpengüzel Integrated Photonics: Materials, Devices, and Applications 8069, 195-199, 2011 | 1 | 2011 |
GHz half wavelength contact acoustic microscopy (HaWaCAM): a feasibility study BAJ Quesson, P Van Neer, MS Tamer, K Hatakeyama, MH Van Es, ... Metrology, Inspection, and Process Control XXXVI 12053, 13-18, 2022 | | 2022 |
Highly spatially resolved chemical metrology on latent resist images M van Es, M Tamer, R Bloem, L Fillinger, E van Zeijl, K Maturová, ... | | 2022 |
Highly spatially resolved chemical metrology on latent resist images E Mv, M Tamer, R Bloem, L Fillinger, Z Ev, K Maturová, D Jvd, R Willekers, ... | | 2022 |
Feasibility of 4 GHz half wavelength contact acoustic microscopy (HaWaCAM) P Van Neer, BAJ Quesson, MS Tamer, K Hatakeyama, MH Van Es, ... 2021 IEEE International Ultrasonics Symposium (IUS), 1-4, 2021 | | 2021 |
Determining interaction forces in a dynamic mode AFM during imaging HS Marnani, MS Tamer US Patent 10,578,643, 2020 | | 2020 |
Sub-surface Imaging with Photo Thermal Actuation ME van Reijzen, MS Tamer, MH van Es, M van Riel, T Duivenvoorde, ... TNO, 2019 | | 2019 |
High Resolution SubSurface Probe Microscopy for node5 applications MH van Es, L Fillinger, MS Tamer, M van der Lans SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019 | | 2019 |
Frequency Modulation Sub-surface Atomic Force Microscopy A Keyvani Janbahan, MS Tamer, MH van Es, MJ van der Lans SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019 | | 2019 |
Thermal nanolithography: A technology compatibility study SRS Rajadurai, MS Tamer, P Paul, K Maturova, JA Wildschut, S Weber, ... SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019 | | 2019 |
Advanced Processing for Quantitative Sub-surface Data Extraction L Fillinger, MS Tamer, MH Es, M vd Lans SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019 | | 2019 |