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Charles Leroux
Charles Leroux
CEA-LETI
Verified email at cea.fr
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Year
75 nm damascene metal gate and high-k integration for advanced CMOS devices
B Guillaumot, X Garros, F Lime, K Oshima, B Tavel, JA Chroboczek, ...
Digest. International Electron Devices Meeting,, 355-358, 2002
1462002
Characterization and modeling of hysteresis phenomena in high K dielectrics
C Leroux, J Mitard, G Ghibaudo, X Garros, G Reimbold, B Guillaumor, ...
IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 …, 2004
1262004
Frequency characterization and modeling of interface traps in gate dielectric stack from a capacitance point-of-view
P Masson, JL Autran, M Houssa, X Garros, C Leroux
Applied Physics Letters 81 (18), 3392-3394, 2002
942002
Hybrid FDSOI/Bulk high-k/Metal gate platform for Low Power (LP) multimedia technology
C Fenouillet-Beranger, P Perreau, L Pham-Nguyen, S Denorme, ...
2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009
612009
Work-function engineering in gate first technology for multi-VT dual-gate FDSOI CMOS on UTBOX
O Weber, F Andrieu, J Mazurier, M Casse, X Garros, C Leroux, F Martin, ...
2010 International Electron Devices Meeting, 3.4. 1-3.4. 4, 2010
512010
Investigations on the thermal behavior of interconnects under ESD transients using a simplified thermal RC network
P Salome, C Leroux, P Crevel, JP Chante
Microelectronics Reliability 39 (11), 1579-1591, 1999
441999
X-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy investigation of Al-related dipole at the HfO2/Si interface
LQ Zhu, N Barrett, P Jegou, F Martin, C Leroux, E Martinez, H Grampeix, ...
Journal of Applied Physics 105 (2), 2009
432009
Large-Scale time characterization and analysis of PBTI in HFO2/Metal gate stacks
J Mitard, X Garros, LP Nguyen, C Leroux, G Ghibaudo, F Martin, ...
2006 IEEE International Reliability Physics Symposium Proceedings, 174-178, 2006
432006
DMILL, a mixed analog-digital radiation-hard BICMOS technology for high energy physics electronics
M Dentan, P Abbon, E Delagnes, N Fourches, D Lachartre, F Lugiez, ...
IEEE Transactions on Nuclear Science 43 (3), 1763-1767, 1996
431996
Characterization and modeling of 2DEG mobility in AlGaN/AlN/GaN MIS-HEMT
I Nifa, C Leroux, A Torres, M Charles, G Reimbold, G Ghibaudo, E Bano
Microelectronic Engineering 215, 110976, 2019
362019
Measurement of dipoles/roll-off/work functions by coupling CV and IPE and study of their dependence on fabrication process
M Charbonnier, C Leroux, V Cosnier, P Besson, E Martinez, N Benedetto, ...
IEEE transactions on electron devices 57 (8), 1809-1819, 2010
352010
Ultra high density three dimensional capacitors based on Si nanowires array grown on a metal layer
PH Morel, G Haberfehlner, D Lafond, G Audoit, V Jousseaume, C Leroux, ...
Applied Physics Letters 101 (8), 2012
332012
An efficient model for accurate capacitance-voltage characterization of high-k gate dielectrics using a mercury probe
X Garros, C Leroux, JL Autran
Electrochemical and solid-state letters 5 (3), F4, 2002
332002
Guidelines to improve mobility performances and BTI reliability of advanced High-K/Metal gate stacks
X Garros, M Cassé, G Reimbold, F Martin, C Leroux, A Fanton, O Renault, ...
2008 Symposium on VLSI Technology, 68-69, 2008
322008
Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C–V
F Piallat, V Beugin, R Gassilloud, L Dussault, B Pelissier, C Leroux, ...
Applied surface science 303, 388-392, 2014
312014
Initial and PBTI-induced traps and charges in Hf-based oxides/TiN stacks
G Reimbold, J Mitard, X Garros, C Leroux, G Ghibaudo, F Martin
Microelectronics Reliability 47 (4-5), 489-496, 2007
312007
Investigation on trapping and detrapping mechanisms in HfO2 films
J Mitard, C Leroux, G Ghibaudo, G Reimbold, X Garros, B Guillaumot, ...
Microelectronic engineering 80, 362-365, 2005
292005
Light emission microscopy for thin oxide reliability analysis
C Leroux, D Blachier, O Briere, G Reimbold
Microelectronic engineering 36 (1-4), 297-300, 1997
291997
Study of a 3D phenomenon during ESD stresses in deep submicron CMOS technologies using photon emission tool
P Salome, C Leroux, JP Chante, P Crevel, G Reimbold
1997 IEEE International Reliability Physics Symposium Proceedings. 35th …, 1997
291997
Experimental determination of mobility scattering mechanisms in Si/HfO/sub 2//TiN and SiGe: C/HfO/sub 2//TiN surface channel n-and p-MOSFETs
O Weber, F Andrieu, M Cassé, T Ernst, J Mitard, F Ducroquet, ...
IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 …, 2004
282004
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