Dielectric filters made of PS: advanced performance by oxidation and new layer structures MG Berger, R Arens-Fischer, M Thönissen, M Krüger, S Billat, H Lüth, ... Thin Solid Films 297 (1-2), 237-240, 1997 | 237 | 1997 |
Influence of etch stops on the microstructure of porous silicon layers S Billat, M Thönissen, R Arens-Fischer, MG Berger, M Krüger, H Lüth Thin solid films 297 (1-2), 22-25, 1997 | 138 | 1997 |
Micromachined inclinometer with high sensitivity and very good stability S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ... Sensors and Actuators A: Physical 97, 125-130, 2002 | 104 | 2002 |
Structuring of membrane sensors using sacrificial porous silicon F Hedrich, S Billat, W Lang Sensors and Actuators A: Physical 84 (3), 315-323, 2000 | 79 | 2000 |
Analysis of the depth homogeneity of p-PS by reflectance measurements M Thönissen, MG Berger, S Billat, R Arens-Fischer, M Krüger, H Lüth, ... Thin Solid Films 297 (1-2), 92-96, 1997 | 74 | 1997 |
Depth inhomogeneity of porous silicon layers M Thönissen, S Billat, M Krüger, H Lüth, MG Berger, U Frotscher, ... Journal of applied physics 80 (5), 2990-2993, 1996 | 66 | 1996 |
Thermal flow sensors for MEMS spirometric devices F Hedrich, K Kliche, M Storz, S Billat, M Ashauer, R Zengerle Sensors and Actuators A: Physical 162 (2), 373-378, 2010 | 63 | 2010 |
Bright visible light emission from electro-oxidized porous silicon: a quantum confinement effect JC Vial, S Billat, A Bsiesy, G Fishman, F Gaspard, R Herino, M Ligeon, ... Physica B: Condensed Matter 185 (1-4), 593-602, 1993 | 52 | 1993 |
Color-sensitive photodetector based on porous silicon superlattices M Krüger, M Marso, MG Berger, M Thönissen, S Billat, R Loo, W Reetz, ... Thin Solid Films 297 (1-2), 241-244, 1997 | 51 | 1997 |
Convection-based micromachined inclinometer using SOI technology S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, W Lang, ... Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 42 | 2001 |
Analysis of the electroluminescence observed during the anodic oxidation of porous layers formed on lightly p‐doped silicon M Ligeon, F Muller, R Herino, F Gaspard, JC Vial, R Romestain, S Billat, ... Journal of applied physics 74 (2), 1265-1271, 1993 | 40 | 1993 |
Electroluminescence of Heavily Doped p‐Type Porous Silicon under Electrochemical Oxidation in Galvanostatic Regime S Billat Journal of the Electrochemical Society 143 (3), 1055, 1996 | 37 | 1996 |
Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity K Kliche, S Billat, F Hedrich, C Ziegler, R Zengerle 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 33 | 2011 |
Monolithic integration of micro-channel on disposable flow sensors for medical applications S Billat, K Kliche, R Gronmaier, P Nommensen, J Auber, F Hedrich, ... Sensors and Actuators A: Physical 145, 66-74, 2008 | 32 | 2008 |
X-ray study of the anodic oxidation of p+ porous silicon D Bellet, S Billat, G Dolino, M Ligeon, C Meyer, F Muller Solid state communications 86 (1), 51-54, 1993 | 29 | 1993 |
Sensor for thermal gas analysis based on micromachined silicon-microwires K Kliche, G Kattinger, S Billat, L Shen, S Messner, R Zengerle IEEE Sensors Journal 13 (7), 2626-2635, 2013 | 26 | 2013 |
Visible light emission from silicon: a quantum effect in highly porous materials JC Vial, R Herino, S Billat, A Bsiesy, F Gaspard, M Ligeon, I Mihalcescu, ... IEEE transactions on nuclear science 39 (4), 563-569, 1992 | 23 | 1992 |
Sens. and Actuators S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ... A 97 (98), 125, 2002 | 17 | 2002 |
A planar thin-film peltier cooler for the thermal management of a dew-point sensor system A Ihring, E Kessler, U Dillner, U Schinkel, M Kunze, S Billat Journal of Microelectromechanical Systems 24 (4), 990-996, 2014 | 12 | 2014 |
Electroluminescent Properties of Porous Silicon Films under Electrochemical Oxidation S Billat, A Bsiesy, F Gaspard, R Herino, M Ligeon, F Muller, R Romestain, ... MRS Online Proceedings Library (OPL) 256, 215, 1991 | 12 | 1991 |